Atomic Force Microscopy - Imaging, Meas., Manip. Surfs. at by V. Bellitto PDF

By V. Bellitto

ISBN-10: 9535104144

ISBN-13: 9789535104148

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86(No. 23): 231101. , Yamaguchi, T. & Visnovsky, S. (2005). Spectroscopic ellipsometry on sinusoidal surface-relief gratings, Appl. Surf. Sci. Vol. 244(No. 1-4): 221–224. , Visnovsky, S. & Otani, Y. (2006). Convergence properties of critical dimension measurements by spectroscopic ellipsometry on gratings made of various materials, J. Appl. Phys. Vol. 100(No. 5): 054906. , Visnovsky, S. & Okamoto, N. (2005). Optical metrology of patterned magnetic structures: deep versus shallow gratings, Proc.

Porto, J. , Carminati, R. & Greffet, J. J. (2000). Theory of electromagnetic field imaging and spectroscopy in scanning near-field optical microscopy, J. Appl. Phys. Vol. 88(No. 8): 4845–4850. , Tortai, J. , & Pauliac, S. (2005). Line edge roughness characterization with a three-dimensional atomic force microscope: Transfer during gate patterning processes, J. Vac. Sci. Technol. B Vol. 23(No. 6): 3075–3079. , Cox, J. R. & Gerton, J. M. (2006). Tip-enhanced fluorescence microscopy of high-density samples, Appl.

Here the oscillation of the probe while scanning is only in the vertical direction so that the inverse profile of the tip is obtained instead of the correct sidewall shape. , sinusoidal gratings) can be accurately detected after applying an appropriate image reconstruction transform such as the one shown by (Keller (1991)). 30 12 Atomic Force Microscopy – Imaging, Measuring and Manipulating Surfaces at the Atomic Scale Will-be-set-by-IN-TECH tip tip servo direction servo direction scan direction scan direction surface surface (a) Conventional mode (b) CD mode tip surface normal tip apex surface point of surface vector of reconstruction point of detected image (c) Surface reconstruction tip normal (d) Overhang Fig.

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Atomic Force Microscopy - Imaging, Meas., Manip. Surfs. at the Atomic Scale by V. Bellitto

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